منابع مشابه
A High Sensitivity Polysilicon Diaphragm Condenser Microphone
This paper presents the analysis, design, fabrication, and testing of a condenser microphone utilizing a thin low-stress polycrystalline silicon diaphragm suspended above a p+ perforated back plate. The microphone is fabricated using a combination of surface and bulk micromachining techniques in a single wafer process without the need of wafer bonding. The device shows sensitivities of -34 dB (...
متن کامل2b2.07pl a Polymer Condenser Microphone on Silicon with On-chip Cmos Amplifier
In this paper the development of a capacitive microphone with integrated preamplifier is described. The condenser microphone is made by micromachining of polyimide on silicon, and is compatible with CMOS technology. Therefore, the structure can be realised by post processing on substrates containing integrated circuits, independently of the IC process. Microphones with a required DC bias voltag...
متن کاملImplementation of the CMOS MEMS Condenser Microphone with Corrugated Metal Diaphragm and Silicon Back-Plate
This study reports a CMOS-MEMS condenser microphone implemented using the standard thin film stacking of 0.35 μm UMC CMOS 3.3/5.0 V logic process, and followed by post-CMOS micromachining steps without introducing any special materials. The corrugated diaphragm for the microphone is designed and implemented using the metal layer to reduce the influence of thin film residual stresses. Moreover, ...
متن کاملAn analytical-numerical method for determining the mechanical response of a condenser microphone.
The paper is based on determining the reaction pressure on the diaphragm of a condenser microphone by integrating numerically the frequency domain Stokes system describing the velocity and the pressure in the air domain beneath the diaphragm. Afterwards, the membrane displacement can be obtained analytically or numerically. The method is general and can be applied to any geometry of the backpla...
متن کاملResponse Identification in the Extremely Low Frequency Region of an Electret Condenser Microphone
This study shows that a small electret condenser microphone connected to a notebook or a personal computer (PC) has a prominent response in the extremely low frequency region in a specific environment. It confines most acoustic waves within a tiny air cell as follows. The air cell is constructed by drilling a small hole in a digital versatile disk (DVD) plate. A small speaker and an electret co...
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ژورنال
عنوان ژورنال: The Journal of the Acoustical Society of America
سال: 1970
ISSN: 0001-4966
DOI: 10.1121/1.1975028